Canon 2007 Annual Report Download - page 43

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41
Canon launched the FPA-7000AS7 ArF immersion lithography
scanning stepper that incorporates a number of advanced
technologies, enabling the mass production of state-of-the-art
semiconductors below 45nmHP (half pitch). Featuring the
world’s highest NA (numerical aperture) of 1.35, the scanning
stepper employs a guideless two-wafer stage system, which has
the advantage of immersion lithography throughout and meets
the demand for high speed and high precision. Moreover, Canon
developed a proprietary immersion method liquid film system.
This system enables a continuous and uninterrupted flow of
water to pass under the lens. As a result, Canon has perfected a
product that supports the full mass production of state-of-the-art
devices below 45nmHP with a maximum resolution of 37nmHP.
CXDI-50G
MPAsp-H700
DIGISUPER 100AF
The NA1.35 lens offers outstanding resolution and quality
37mm
Fiscal 2007 Review
Net sales of Optical and Other Products
totaled ¥393.1 billion, down 7.2% year on
year. On an individual product basis, results
in exposure equipment for LCDs were weak
due to a downturn in LCD panel manufac-
turer capital investment. While sales of
semiconductor exposure equipment were
essentially on par with the previous year,
results remained soft.
In the semiconductor production
equipment market, demand for DRAM and
NAND flash memories increased. This was
particularly true of Asia, an area where
memory-device manufacturers are
concentrated. Canon launched the new
FPA-5510iZ, an enhanced model more
productive than the existing FPA-5500iZ, in
order to retain market share amidst heavy
competition. Moreover, Canon shipped the
dry ArF scanning stepper FPA-7000AS5,
and the immersion lithography scanning
stepper FPA-7000AS7, thus laying the
groundwork for future sales growth.
The market for exposure equipment for
LCDs contracted substantially amidst efforts
to increase LCD TV size and achieve further
productivity improvements in monitor panel
production. The MPAsp-H700 LCD expo-
sure equipment for eighth-generation
panels have received rave customer reviews
not only for their high-quality, high-optical
performance and high productivity, but for
a significantly shorter installation time.
In digital radiography systems, Canon
has shipped a total of 6,000 units since
1998. Sales of the portable CXDI-50G have
been favorable, especially outside Japan.
In the large-format printer market,
Canon successively launched nine new
models to bolster its product lineup. The
Company also increased unit printer sales as
well as ink sales volumes due to the grow-
ing number of printers in the market.
In broadcast and communications, sales
of the DIGISUPER 100AF field zoom broad-
casting lens fared well on the back of
growth in the penetration of hi-vision large-
format TVs. This lens contains a unique AF
mechanism that enables exact focus of
objects moving at high speed as well as an
optical image stabilizer developed from
know-how acquired from EOS interchange-
able lenses.
65mm
imagePROGRAF iPF9100
Innovative Product — FPA-7000AS7 Immersion Lithography Scanning Stepper