Nikon 2011 Annual Report Download - page 16

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LCD Stepper
FX-903N
In terms of future product strategies, with
immersion double patterning the best method to
achieve mass production of semiconductors at 22 nm,
we consider an extension of this technology to be
a viable candidate to 16 nm, and will focus our
development efforts in this area. Extreme Ultra
Violet Lithography (EUVL) is another candidate for
16 nm device production, and for the time being we
plan to concentrate on development of the optical
systems that are the most important aspect of
this technology. We anticipate that production of
semiconductors at 16 nm will begin around 2016,
with full-fledged mass production emerging
around 2018–19.
14 Review of Operations: Precision Equipment Company
Increase Sales of LCD Steppers and Scanners for
Small to Medium-Sized High-Precision Panels
For the fiscal year ending March 2012, we expect the
market for LCD steppers and scanners (on a unit
basis) to be roughly comparable to that of the previous
fiscal year. At the same time, demand for panels used
in smartphones and tablet computers remains strong,
and we project that the major portion of the market
will comprise LCD steppers and scanners used for
small to medium-sized high-precision panels.
Nikon specializes in lithography equipment for
this field, and we have sufficient capabilities to
further enhance system performance to satisfy
customer requirements. Accordingly, we are
anticipating a considerable increase in unit sales of
LCD steppers and scanners for small to medium-
sized high-precision panels.
Meanwhile, we expect scanners for large-screen
LCD televisions to experience a market adjustment in
the fiscal year ending March 2012, in reaction to the
earlier rapid growth. However, we believe there is the
potential for demand for these scanners to pick up
again from the fiscal year ending March 2013, as
demand for replacement televisions and other factors
drive a further increase in the larger size of LCD panels.
Enhancing Competitiveness
The Precision Equipment Company increased its
operating income by more than ¥60,000 million and
regained profitability in the fiscal year ended March
2011. We anticipate another sharp rise in earnings
in the fiscal year ending March 2012, but are still not
satisfied with this level of gains. Nikon has ample
potential to achieve further earnings increases.
For example, Nikon ArF immersion scanners
employ a new tandem stage platform rather than
a single stage, which provides advantages for both
improved throughput and overlay accuracy. In
addition, our LCD steppers and scanners utilize a
technology called multi-lens projection systems that
allows them to be easily adapted for larger glass
plates without any loss in resolution. We will work
to strengthen our competitiveness by building upon
such advantages to the fullest extent possible.