Nikon 2011 Annual Report Download - page 15

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ArF Immersion Scanner
NSR-S620D
leading-edge NSR-S620D, which now accounts for
the majority of unit sales of ArF immersion scanners.
This shift has greatly improved profitability in this
area, and we expect that it will contribute to an
increase in net sales and a sharp rise in earnings
for the Precision Equipment Company overall.
As of February 2011, we had achieved throughput
of 200 wafers per hour and overlay accuracy of
2.5 nm with the NSR-S620D. Depending upon the
customers’ processing conditions, the NSR-S620D
is able to produce more than 3,000 wafers per day.
We believe that if we continue to enhance the
system’s capabilities to meet customer needs, we
can achieve even higher earnings for the fiscal year
ending March 2013 and onward.
We are also working to shorten the lead time
for the scanner production process. Specifically,
the lead time for manufacturing an ArF immersion
scanner, which until now has been 12 months, will
be halved in the fiscal year ending March 2012.
This will allow us to both lessen our inventory risk
and respond quickly to customer needs, while also
enhancing earnings capacity by reducing costs.
Great East Japan Earthquake. Demand for large-
screen LCD televisions remained strong, and unit
sales of scanners for 7th generation large glass
plates and beyond increased to 30 units from 19 in
the previous fiscal year.
Measures in the Medium Term
Management Plan
Improve Profitability by Enhancing the Capabilities
of the NSR-S620D ArF Immersion Scanner
The advanced capabilities of the NSR-S620D ArF
immersion scanner will provide increased value for
users. Therefore, it is a priority for Nikon to continue
to enhance system performance to thereby expand
S620D market share.
For the fiscal year ending March 2012, we expect
unit sales of ArF immersion scanners to be roughly
equivalent to those of the previous fiscal year. Sales
are gradually shifting from the previous model
NSR-S610C system to the highly competitive,
13Annual Report 2011Nikon Corporation
KAZUO USHIDA
Director, Member of the Board and
Senior Executive Officer
President of Precision Equipment Company