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13
NIKON CORPORATION ANNUAL REPORT 2012
from customers has
been positive, and we
expect full-fledged
introduction at customer plants from the second
half of the fiscal year ending March 2013. Drawing
on this competitiveness, we aim to achieve a 40%
share of the market for ArF immersion scanners by
the fiscal year ending March 2015.
Another product underpinning our push to
increase market share is the new NSR-S320F ArF
scanner announced in December 2011. This new
model utilizes a common platform with the NSR-
S621D, and offers overlay accuracy and throughput
comparable to that of an immersion scanner. We
believe this scanner will allow us to respond to
new customer needs.
LCD Steppers and Scanners to Meet Need for
Higher Resolution and Accuracy
In the LCD steppers and scanners market during
the fiscal year ending March 2013, we anticipate
that demand will remain firm for lithography
equipment for small to medium-sized high-
definition panels, mainly 6th generation plates,
but will decline for large glass plates that are 7th
generation and beyond. Overall, we expect unit
demand to decline to around 60 units, from 110 in
the previous year.
facilities during the Great East Japan
Earthquake last year, but restoration was
achieved quickly and unit shipments exceeded
initial projections.
In IC steppers and scanners, sales totaled
84 units (including refurbished equipment).
We focused particularly on expanding sales of
ArF immersion scanners, and gained several
new customers. We also streamlined the
manufacturing process, resulting in a significant
shortening of the production lead time from twelve
months to six. This enhanced our ability to respond
to shifts in the market, while also strengthening
our earnings structure.
Market Prospects and the Medium Term
Management Plan Strategies
Greater Competitiveness in IC Steppers and
Scanners to Expand Market Share
In response to a slowdown in the semiconductor
market, we anticipate that during the fiscal year
ending March 2013, the market for IC steppers
and scanners will soften to unit demand of around
240 units from 311 in the previous year. However,
we expect unit demand to rebound to over 300
units during the fiscal year ending March 2015.
Despite the current difficult market environment,
Nikon plans to secure earnings by enhancing the
competitiveness of its products, and expanding its
market share.
One of the products that will be key
to greater market share is the new
NSR-S621D ArF immersion scanner,
which we began shipping in January
2012. This new model retains the
proven platform of the NSR-S620D,
while offering advancements in overlay
accuracy and throughput. The reaction
ArF Immersion Scanner
NSR-S621D