Nikon 2002 Annual Report Download - page 9

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07
NSR-S306C
ArF excimer stepper with ultra-high
N.A. lens (N.A. of 0.78)
NSR-S205C
KrF excimer stepper applicable to mass
production of devices up to 130-nm
FX-21S
LCD stepper for production of large
LCD panels
FX-701M
LCD stepper for production of
medium-sized LCD panels