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10
development of the NSR-S620D ArF immersion
scanner for double patterning.
In developing the NSR-S620D, we set ex-
tremely demanding performance targets,
calling for a throughput of 200 wafers per
hour and an overlay accuracy of 2 nm.
The NSR-S620D also incorporates a complete
modular construction based on the most
recent design concepts. This facilitates testing
at the module level, as well as easy upgrades
at customer sites, and maximizes the overall
precision. Customers will be able to just
change the necessary modules, rather than
purchase entirely new equipment, when
responding to further device shrinkage.
A new building for the production of the
NSR-S620D has been operating at the
Kumagaya Plant since April 2010. For precise
module-level manufacturing and testing, the
new building features a higher level of clean-
liness as well as the latest technologies to
counter minute fl oor vibrations.
ArF immersion scanners hold the key to
earnings amid the recovery of the semicon-
ductor market. The scale of the ArF immersion
scanner market is expected to be on the order
of 100 units per year from the fi scal year
ending March 2011 through the fi scal year
ending March 2013. Nikon plans to steadily
increase its share of the ArF immersion
scanner market, centering on the NSR-S620D.
LCD Steppers and Scanners
Using Orders Received in China as a
Springboard to Boost Our Position Further
As sales of large-screen LCD televisions
remain favorable, the demand for LCD step-
pers and scanners is projected to hold fi rm
from the fi scal year ending March 2011
through the fi rst half of the fi scal year ending
March 2012, centered on models for 8th
generation glass plates. In addition, the trend
to higher TV image quality and the spread of
3D television are expected to accelerate the
move toward higher-performance, larger-
screen LCD televisions, as well as the shift to
10th generation and then 11th generation
glass plates.
Nikon’s multi-lens projection optical system
is the greatest strength of our LCD scanners
in responding to this shift toward higher-
performance, larger-screen LCD televisions.
A new building at the Kumagaya Plant that has been operating since April 2010
(%)
2008 2009 2010
0
100
80
60
40
20
LCD Steppers and Scanners,
Sales Unit Ratio by Generation
Years ended March 31
42
11
47
34
41
25
40
36
24
7G and
above
5G/6G
Up to 4G