Canon 2002 Annual Report Download - page 26

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24
Canon participates in a consortium to develop device and related technologies
for next-generation extreme ultraviolet (EUV) lithography systems
Akira Tajima, Chief Executive of Optical Products Operations,
T
alks about Ste
pp
er Strate
gy
Persistent sluggishness in the IT industry worldwide led to a sharp drop in capital investment in semiconductor
production equipment. This situation had a negative impact on demand for steppers, devices that use
photolithography to expose circuit patterns on silicon substrates. On the other hand, because the stepper
market is expected to improve in the next few years, Canon is continuing to invest in new technology
development. In 2002, we released the FPA-5000ES4, a krypton fluoride (KrF) excimer laser scanning
stepper offering high throughput as well as the world´s highest numerical aperture (NA) brightness.
Canon is planning the timely release of new steppers compatible with ultrafine circuit patterns and
offering other specifications corresponding to needs in the marketplace. In addition, we will be working on
device and related technologies to be incorporated in next-generation extreme ultraviolet (EUV) lithogra-
phy systems through the Extreme Ultraviolet Lithography System Development Association (EUVA), a
technology consortium established in Japan with active support from the government and universities.
Expansion of the market for LCD panels drove demand for
mirror-projection mask aligners in Canon´s MPA series.
We became the first company in the industry to market a fifth-
generation mask aligner: the MPA-7500. This award-winning
product was well received and contributed to an improvement
in Canon´s market share. The LCD television market is expected
to continue expanding at a robust pace through 2003, which
we anticipate will boost our mask aligner sales. To keep apace
of trends in the marketplace, we intend to develop products
that accurately reflect user needs for large glass substrates
and high resolution. Our new mirror-projection mask aligner fueled a
market share increase.
The Semiconductor Production Equipment Group, which deals with
ultraprecise technologies at the nanometer level, might be called the
face of technology at Canon. As competition intensifies in our primary
markets, we are pushing ahead toward the goal of becoming the
world´s No.1 provider of steppers. Our basic strategy is to provide
equipment that precisely matches needs in the marketplace on a
timely basis and thereby achieve the top position in our market
worldwide. We are aggressively researching both technologies and
customer needs, accelerating product development and production,
and reinforcing our sales, service and support functions. To maintain
the technological edge, we are also continuing to invest in and speed
up research of technologies that will form the core of next-generation
equipment, such as F2(fluorine), EB (electron beam) and EUV
(extreme ultraviolet) lithography.
Optical Products