Nikon 2008 Annual Report Download - page 11

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NSR-S610C ArF immersion scanner worldwide,
and increased sales of the NSR-S308F ArF scanner.
Nikon’s cutting-edge scanners are recognized for their technological superiority—
we posted expanded shipments of the
Attaining the Leading Market Share for
ArF Immersion Scanners
With the shift from NAND fl ash memory to DRAM
and logic LSI, which use immersion as part of the
production process, a considerable reduction in
defects will be required. Nikon’s ArF immersion
scanners with Local Fill Nozzle have emerged as
clearly superior in eliminating defects.
The Local Fill Nozzle is an advanced design
that helps to eliminate immersion-induced
defects caused by bubbles, water spots, or particle
contamination. The prevention of evaporation of
immersion fl uid and accompanying generation
of vaporization heat also provides greater align-
ment accuracy. Local Fill Nozzle is also compatible
with the topcoat-less resist (photoresist) process,
reducing the number of processes and cutting
manufacturing costs.
Nikon’s distinctive Tandem Stage improves
productivity by separating the production process
into two stages with different functions—Exposure
and Calibration. This allows for high throughput
and alignment accuracy, the two most crucial
performance aspects in scanners.
Nikon’s scanners comprise highly independent
modular units. This allows for stable, long-term
operation, while also making maintenance signifi -
cantly easier, and minimizing the downtime of the
scanner.
Nikon is meeting these high level demands with
superior technological capabilities that outstrip
those of its competitors, and is seeking the lead-
ing market share for cutting-edge models of ArF
immersion scanners.
Adapting to Changes in the
Semiconductor Market
Attaining the leading market share for cutting-edge
scanner models will demonstrate Nikon’s techni-
cal capabilities. At the same time, we will enhance
competitiveness for i-line steppers, KrF scanners
for non-critical layers, in addition to cutting-edge
ArF scanners including immersion-type in order to
secure high earnings and a large market share.
Nikon’s unit sales of ArF scanners
rose to 73 units
for the year ended March 2008
from 40 the previous year.
Nikon Annual Report 2008 9