Nikon 2006 Annual Report Download - page 12

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LCD exposure systems manifest
Nikon strengths
The size of fl at-screen LCD TVs is increasing at a rapid
rate. Exposure tools of the 7th and 8th generation
variety play an important role in the mass-production
of LCD panels of the 40-inch class and above. And
the adoption of Nikon’s multi-lens projection opti-
cal system in large-size exposure systems enables the
effective exposure of multiple panels, making it ideal
for this mass-production. Sales of both the FX-71S for
7th generation plate sizes and of the FX-81S for 8th
generation plate sizes have been strong, and Nikon’s
share in the market for large LCD exposure systems has
risen dramatically. Consequently, Nikon is confi dent that
it has secured lasting product competitiveness in the
LCD exposure system market, including for small- and
medium-size panels.
EUVL – next-generation
technology
Nikon sees EUVL (Extreme Ultraviolet Lithography) as
the most promising next-generation technology beyond
immersion. Plans are to start shipments of its fi rst system
incorporating EUVL technology in the fi rst half of 2007
(CY), so development is currently in full swing. EUVL
works at a wavelength of 13.5 nm, 14 times shorter than
that of an ArF excimer laser, which means it can provide
IC makers with the support required for device shrinkage.
Key objectives of the medium
term management plan
1. In IC steppers and scanners:
a) Nikon aims to gain top market share in ArF
systems, including cutting-edge immersion
lithography products. Nikon believes that
maintaining a dominant position in state-of-
the-art equipments will have positive spillover
effects on its entire IC stepper and scanner
business, which also includes KrF and i-line
steppers and scanners.
b) Nikon intends to increase essential R&D
investment and capital investment to develop
next-generation steppers and scanners and
boost productivity. The ultimate goal is to
develop and release competitive products in a
timely manner.
c) Nikon will create and achieve a clear roadmap
for development using the most advanced
technology to drive advancement in the IC
stepper and scanner market.
2. In LCD exposure systems:
a) Nikon aims to grab top share in the market for
large LCD exposure systems via swift response
to the ever-increasing size of LCD panels by
leveraging competitive advantages of the multi-
lens projection optical system.
b) Through the development of LCD exposure
systems that meet shrinkage demands and of
high-speed systems, Nikon seeks to satisfy pre-
cise customer needs for equipment for small-
and medium-size LCD panels.
3. Nikon will promote simplifi ed design and module
standardization, and establish a long-life platform
aimed at reducing inventory, costs and produc-
tion lead-times, including installation. By doing so,
Nikon can boost trust from customers as well as
secure higher profi ts.
REVIEW OF OPERATIONS
10